AP12PA, Pneumatic Actuation Pressure Regulator, High Flow (Tied-diaphragm)
Series AP is an ultra high purity (UHP) diaphragm valve for gas delivery in semiconductor and other clean industries. The series is available in air operated and manually operated valves with low and high pressures. Available options include Hastelloy® C22, 316L SS secondary remelt, and the choice of normally closed or normally open indicator switch.
Actuation control pressure isolated from process gas by two seals
Body material: 316L SS secondary remelt
High inlet pressure type: Standard Max. 1700 psig (11.7 MPa); HR Max. 3000 psig (20.7 MPa
Flow capacity: Standard to 800 slpm
Ni-Cr-Mo alloy internals available for corrosion resistance
100 psig (0.69 MPa) outlet pressure achievable with 80 psig (0.55 MPa) control pressure or less