High Vacuum Products
High Vacuum for semiconductor wafer manufacturing requires precision equipment to exhaust air from the process chamber and to supply atmospheric to restore the chanber to atmospheric pressure.
Slit Valves (XGTP) allow access to transfer the wafer into and out of the process chamber.
Angle and Inline Valves (XL, XM, XY) are used to exhaust the chamber.
Supply Valves (XSA, XVD) are used to supply gases to the chamber.